Silicon Sensors and Actuators. The Feynman Roadmap, 1st ed. 2022, Hardback/***

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Publisher: Springer Nature Switzerland AG Illustration(s): 300 Tables, color; 623 Illustrations, color; 261 Illustrations, black and white; XIII, 997 p. 884 illus., 623 illus. in color. Number of pages: 997 Publication date: 2022 Dimensions: 162 x 244 x 64 Cover type: Hardback Editor(s): Sarah Zerbini